SID4 UV-HR: High resolution wavefront sensor in UV range

PHASICS extends the SID4 wavefront sensor product line to UV wavelengths, from 190 nm to 400 nm.

The SID4 UV-HR advantages come from the 4-Wave optical metrology, the SID4 UV-HR is perfectly adapted for optical components characterization (used in lithography, semiconductor…) and surface inspection (wafers inspection…). With such sensitivity, SID4 UV-HR is the cost effective UV solution for high resolution characterization.

SID4 UV-HR wavefront sensor key features

Very high resolution (250 x 250)
Large analysis pupil (8.0 mm x 8.0 mm)
UV spectrum covered
High sensitivity (0.5 nm)
Optimal signal to noise ratio

SID4 UV-HR detailed specifications

Aperture dimension	8.0 x 8.0 mm²
Spatial resolution	32 µm
Sampling	250 x 250
Wavelength range	190 - 400 nm
Accuracy (absolute)	10 nm RMS
Sensitivity	0.5 nm RMS
Dynamic	>200µm
Sensitivity curvature measurement	<5. 10-4 m-1
Analysis rate	1 fps
Acquisition rate	30 fps
Dimensions (lxHxL)	95 x 105 x 84 mm
Weight	900 g

SID4 UV-HR datasheet