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SID4 HR: Optical metrology high resolution wavefront sensor

SID4-HR front view      SID4-HR back view

SID4-High Resolution wavefront sensor is adapted for optical metrology needs. It associates the SID4 ease of implementation with ultra high resolution. Dedicated to optical components metrology (lens, objective, aspheric, microlens characterisation...), it allows sampling on a phase map of 300x400 measurement points and to access high precision.

SID4-HR wavefront sensor genuine features
  • Ultra high sampling resolution (300x400)
  • High measurement reproducibility
  • Large analysis pupil (8.9mm / 11.8mm)
  • High dynamic range
  • Instantaneous measurement
  • Optimal signal-to-noise ratio
  • Insensitive to vibrations
High Resolution advantages

Phase plate measurement

  • SID4-HR high resolution wavefront sensor (300x400 measurements points) is adapted precisely to optical metrology needs
  • Using high performance camera, signal-to-noise ratio is very high
  • Instantaneous measurement gives an immediate information (120000 points) on the whole object
  • Very short exposure time ensures moving object
  • SID4 HR compactness gives an ease of implementation on fabrication process already existing
SID4-HR detailed specifications
Aperture dimension 8.9 x 11.8 mm2
Spatial resolution 29.6 µm
Sampling 300 x 400 ( >120 000 points )
Wavelength range 350 nm to 1100 nm
Precision (absolute/relative) 10 nm RMS / 2 nm RMS
Repeatability 2 nm RMS
Dynamic > 500 µm
Acquisition frequency 10 fps
Real-time processing frequency > 3 fps (full resolution)
Dimensions (l x H x L) 76 x 63 x 132 mm
Weight 620 g